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| Serontech 場發射 FESEM SEMIRON5000 |
Electron Gun Source : Schottky FE-Tip
Resolution : 1.0 nm @30KeV SE/2.0nm @BSE
Magnification : 10X ~1,000,000X
Image :
Secondary Electron Image SEI,
Backscattered Electron Image,
TSEM(Option)
Accelerating Voltage : ~30kV (Continuous Voltage Change)
Gun Alignment : Auto-Gun Alignment (Using Histogram)
Detector :
ET-Type SE Detector (SE-BSE image mode without BSEdetector
for uncoated sample inspection)& CCD
Stage Motorization :
5-Axis Motorized Stage
Auto-stepping & Tiling, Navigation & Retrieval Positioning
Options : BSE, EDS, WDS,EBSD,TSEM, Load-lock Chamber etc.
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| Serontech 桌上型 mini SEM Aura100 |
• Accelerating Voltage (5~20kV for SI Photodiode BSE)
• Magnification : 30,000X with BSE Detector
(Additional Digital Zoom 2X, 4X, 8X)
• Auto-focus/Auto-Stigmator/Auto-Contrast-Brightness/
Auto-Gun Alignment & etc.
• Charge-up Reduction Mode
• Be Equipped with Powerful S/W
• Be Equipped with AOI Measurement Tool
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| Serontech 桌上型 mini SEM Aura200 |
• Accelerating Voltage : 1kV~20kV
• Magnification: ~ Max. 60,000X
(Additional Digital Zoom-In 2X, 4X, 8X)
• Detector: SE Detector
• Auto-focus/Auto-Stigmator/Auto-Contrast-Brightness/
Auto-Gun Alignment
• Charge-up Reduction Mode
• Be Equipped with Powerful S/W
• Be Equipped with AOI Measurement Tool
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| Serontech Compact SEM AIS1800C |
Resolution : 5.0 nm @20kV SE,4.0nm @30kV SE
Magnification : 10X ~200,000X (Max.) ( Digital Zoom 2X, 4X, 8X)
Accelerating Voltage : 0.6kV~30kV
Electron Gun Type : Tungsten Filament
Detector :
ET-Type SE Detector (SE-BSE Conversion Mode Without BSE detector for
Non-coating sample inspection)
Automation Function :
Auto-Gun Alignment , Auto-Focus, Auto-Stigmatism, Auto Contrast/
Brightness, Emission Current & etc
Stage Motorization :
Standard : 5-Axis Manual Stage
Option :3-Axis(X,Y,R)Motorized Stage. Position Retrieval
(Auto-Stepping & Tiling Function for wide FOV & Ultra Pixel
resolution)
Analysis Tool : EDS, BSE,TSEM, 3D Reconstruction S/W & etc.
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| Serontech Compact SEM AIS2000C |
Resolution : 3.0 nm @20/30kV SE
Magnification : 10X ~300,000X (Max.) ( Digital Zoom 2X, 4X, 8X)
Accelerating Voltage : 0.6kV~30kV
Electron Gun Type : Tungsten Filament
Detector :
ET-Type SE Detector (SE-BSE Conversion Mode Without BSE detector for
Non-coating sample inspection)
Automation Function :
Auto-Gun Alignment , Auto-Focus, Auto-Stigmatism, Auto Contrast/
Brightness, Emission Current & etc
Stage Motorization :
Standard : 5-Axis Manual Stage
Option :3-Axis(X,Y,R)Motorized Stage. Position Retrieval
(Auto-Stepping & Tiling Function for wide FOV & Ultra Pixel
resolution)
Analysis Tool : EDS, BSE,TSEM, 3D Reconstruction S/W & etc.
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| Serontech Normal SEM AIS2300C |
Resolution : 3.0 nm @30kV SE 4.0nm BSE
Magnification : 10X ~1,000,000X (Max.)
Accelerating Voltage : 0.6kV~30kV
Electron Gun Type : Tungsten Hair-pin Filament
Detector :
ET-Type SE Detector (SE-BSE Conversion Mode Without BSE detector for
Non-coating sample inspection)
Automation Function :
Auto-Gun Alignment , Auto-Focus, Auto-Stigmatism, Auto Contrast/
Brightness, Emission Current & etc
Stage Motorization :
Standard :3-Axis(X,Y,R)Motorized Stage. Position Retrieval
Auto-Stepping & Tiling Function for wide FOV & Ultra Pixel
resolution
Option :Additional Axis Motorization(T,Z) is available.
Analysis Tool : EDS, BSE,TSEM, 3D Reconstruction S/W. CCD Camera & etc.
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| Serontech Normal SEM AIS2500C |
Electron Gun Source : LaB6 Filament Cathode
Resolution : 2 nm @ 30KeV SE /3nm @BSE
Magnification : 10X~ 1,000,000X
Accelerating Voltage : 0.6kV~30kV
Gun Alignment : Auto-Gun Alignment (Using Histogram)
Detector : ET-Type SE Detector (SE-BSE Conversion Mode Without
BSE Detector for Non-Coating Sample Inspection)
Automation Function :
Auto-Gun Alignment, Auto-Focus, Auto-Stigmatism, Auto Contrast/
Brightness, Emission Current Auto-stepping & Tiling, Auto
photograph by pre-setting etc.
Stage Motorization :
Standard: 3-Axis(X,Y,R) Motorized Stage
Position Retrieval (Auto-Stepping& Tiling Function forwide FOV &
Ultra Pixel resolution
Additional Axis Motorization(T,Z) is available
Option : BSE, EDS, WDS, EBSD, TSEM, Load-lock Chamber& etc.
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| Serontech Review-SEM |
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Desgin for customer |
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| Serontech Hybrid Complex XEM |
High-resolution SEM imaging and X-RAY Hybrid equipment in one!
1) Possible nm resolution imaging in the implementation of the SEM
2) Convergence System with Realistic price
3) Sub-micron Spot Size and Probe current implementation of more than 100 uA max!
4) Target Spot ease of positioning of the micro-
5) Tungsten Target Metal apply; Target surface state of the sample can be observed
6) Faraday cage current through the probe check
7) Custom Fit Product for a research unit |
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| Serontech NANO MANIPULATOR (FINGER) |
Apply for the Advanced Nano Manipulator of Switzerland & Germany
Are you working in the field of …
1) Material Research
2) Forensics / Crime research
3) Dimensional Quality Control
4) High Resolution Analysis
5) Tribology in-SEM Nanofabrication
6) Semiconductor development and production |
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| Serontech 微區電子束焊接儀 AIW50 |
The world's first designed Hybrid Sub-Micron Joining System. It is also applicable to Nano welding.
1) SEM Mode by A few Nano Sized reolution.
2) Sub-micron Sized E-beam Joining Mode - (Max.Ip > 100uA)
3) Possible customizing application like chamber, stage, pump, loadlock and etc.
4) Compact Size & low keV Electron Gun.
5) Possible Manipulator attachment in Chamber.
6) Possible process observation by using BSE detector
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| Serontech 電子束焊接儀 EBW |
SST & PTR -- Leading German supplier of the E-beam Welder
1) 30 KW, 60KW Electron Beam Power
2) Beam Sweep System
3) Beam Guidance System
4) Double Refraction System Defect Eliminates System
5) Electron –Optic System of Medium Power
6) Acceleration Voltage(Control System)
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| Camscan Apollo 300 FEG-SEM 蕭基場發射式掃描電子顯微鏡 |
超高探測電流穩定度, 超長電子槍壽命
30kV加速電壓, 可選配50kV加速電壓
可變電子束能量技術, 高解析力
業界最優低倍率(x3)分析能力
同時配備Through-lens和in-chamber偵測器
超大樣品室
十六個接口可搭載各種不同探測器, 滿足各種分析需求
業界唯一六軸eucentric樣品台, 並可乘載5kg重樣品
可變真空分析能力
可搭載各種分析用substage
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| Camsan CS series 掃描式電子顯微鏡 |
鎢燈絲, LaB6和場發射式三種電子槍選擇
業界唯一機體外調整LaB6位置能力
可選配30, 40, 50kV加速電壓
可用於電子束蝕刻
可變電子束能量技術, 高解析力
超大樣品室
十六個接口可搭載各種不同探測器, 滿足各種分析需求
業界唯一六軸eucentric樣品台, 並可乘載10kg重樣品
可變真空, 環境掃描分析能力
可搭載各種分析用substage
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| Camscan X500 電子束晶體探針 |
蕭基場發射式電子槍
超高探測電流穩定度, 超長電子槍壽命
業界唯一傾角電子槍式電鏡
水平放置樣品, 避免樣品固定與樣品加熱後液化流失之問題
可對樣品進行高溫至1500度C之分析
優良隔熱效果, 保護偵測器與電子槍
多接口分析室, 可配備前向散射, 背向散射偵測器等多種分析功能
低真空分析能力
可搭載多種分析用substage
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